GigaLane is a leading supplier of Deep Reactive Ion Etching tools with a very large installed base in Asia by many of the major chip manufacturers. The company was founded in year 2000 and won a Word Class 300 Award in 2014. The focus in R&D and continuous tool and process improvements has lead GigaLane to become a key player in deep etch with both Bosch and Non-Bosch processes. Now for the first time GigaLane have decided to approach the European market and have selected TFE as their partner for sales and service support.
The GigaLane product offer includes a broad range of DRIE tools for R&D and mass production applications with a wafer processing capability up to the 300 mm size. The GigaLane tools provide: